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 Facilities                                                                                            

 

MBD/ IBAD / PVT / RTP / EMS / Micro PL System/ UV-Vis

   MBD( Molecular Beam Deposition)

  

UHV System

Metal thin film deposition with 4 effusion cells

Double Chamber

 

 

   

   IBAD(Ion Beam Assisted Deposition)

  

Base Pressure: 1×10-8 torr

Double Kaufman Ion Guns

4 targets

Substrate heating up to 800

                                                                                    

 

PVT (Physical Vapor Transport System)

  

Physical vapor transport sytem for the growth of CdS, CdSe, ZnTe, etc.

 

 

 

  RTP(Rapid Thermal Process)

         

 

Rapid Thermal Annealing and Oxidation System (home built)

 

 

                                                                                more

   

Electrical Measurement System

  

Temperature Variable Probe Station (home built)

Deep Level Transient Spectroscopy (DLTS) composed of Boonton 7200 Fast C-meter and Tabor 8551 Pulse generator and Tektronics Multimeter

Capacitance-Voltage Measurement System(Keithley 590)

Quasi-static Capacitance-Voltage /Current-Voltage Measurement System (Keithley 595)                       more

   

Micro PL (Photoluminescence)/Raman System

  

Photoluminescence (Dongwoo Optron Monora)

He - Cd Laser (Melles Griot series 74, 325nm)

Argon Laser (Lasos series 60, 488nm)

DPSS Laser (CNI MBL-III-473, 473nm)

Nitrogen pulse Laser (VSL-337i, 337.1nm)

Lock-In Amplifier (Model SR810 DSP)/Chopper (SR640)

Raman/UV/vis filter cubes and Andor CCD camera

APD cryogenic system (10K)                                more

   

UV-Vis Spectrophotometers

  

Cary 50 UV-Vis spectrophotometer (Varian)

Reflectance measurement modules

 

                                                                                 

 

Common facilities (TEM, FESEM, XRD, etc.)