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MBD/ IBAD / PVT / RTP / EMS / Micro PL System/ UV-Vis

   MBD( Molecular Beam Deposition)


UHV System

Metal thin film deposition with 4 effusion cells

Double Chamber




   IBAD(Ion Beam Assisted Deposition)


Base Pressure: 1×10-8 torr

Double Kaufman Ion Guns

4 targets

Substrate heating up to 800



PVT (Physical Vapor Transport System)


Physical vapor transport sytem for the growth of CdS, CdSe, ZnTe, etc.




  RTP(Rapid Thermal Process)



Rapid Thermal Annealing and Oxidation System (home built)





Electrical Measurement System


Temperature Variable Probe Station (home built)

Deep Level Transient Spectroscopy (DLTS) composed of Boonton 7200 Fast C-meter and Tabor 8551 Pulse generator and Tektronics Multimeter

Capacitance-Voltage Measurement System(Keithley 590)

Quasi-static Capacitance-Voltage /Current-Voltage Measurement System (Keithley 595)                       more


Micro PL (Photoluminescence)/Raman System


Photoluminescence (Dongwoo Optron Monora)

He - Cd Laser (Melles Griot series 74, 325nm)

Argon Laser (Lasos series 60, 488nm)

DPSS Laser (CNI MBL-III-473, 473nm)

Nitrogen pulse Laser (VSL-337i, 337.1nm)

Lock-In Amplifier (Model SR810 DSP)/Chopper (SR640)

Raman/UV/vis filter cubes and Andor CCD camera

APD cryogenic system (10K)                                more


UV-Vis Spectrophotometers


Cary 50 UV-Vis spectrophotometer (Varian)

Reflectance measurement modules




Common facilities (TEM, FESEM, XRD, etc.)